Description
OPTIMIZED UV TREATMENT FOR MICROELECTRONICS
Total Organic Carbon (TOC) is found in all water supplies as naturally occurring organic matter. UV treatment is a very effective process step in the breakdown and reduction of TOC in water to create ultrapure water used in micro-electronics applications. UV systems designed for TOC reduction require special geometries and high purity quartz materials that are partially transparent to short UV wavelengths. TOC reduction is achieved by using a special 185 nm synthetic UV lamp and quartz sleeve to break down low molecular weight organics by dissociation of molecular bonds and the generation of aggressive hydroxyl radicals from water molecules that break-down organic compounds.